Analysis and Design Principles of MEMS Devices

Nonfiction, Science & Nature, Technology, Technical & Manufacturing Industries & Trades, Manufacturing
Cover of the book Analysis and Design Principles of MEMS Devices by Minhang Bao, Elsevier Science
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Author: Minhang Bao ISBN: 9780080455624
Publisher: Elsevier Science Publication: April 12, 2005
Imprint: Elsevier Science Language: English
Author: Minhang Bao
ISBN: 9780080455624
Publisher: Elsevier Science
Publication: April 12, 2005
Imprint: Elsevier Science
Language: English

Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference for researchers and engineers in the field.

* Presents the analysis and design principles of MEMS devices more systematically than ever before.

* Includes the theories essential for the analysis and design of MEMS includes the dynamics of micro mechanical structures

* A problem section is included at the end of each chapter with answers provided at the end of the book.

View on Amazon View on AbeBooks View on Kobo View on B.Depository View on eBay View on Walmart

Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference for researchers and engineers in the field.

* Presents the analysis and design principles of MEMS devices more systematically than ever before.

* Includes the theories essential for the analysis and design of MEMS includes the dynamics of micro mechanical structures

* A problem section is included at the end of each chapter with answers provided at the end of the book.

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