Atomic Layer Deposition for Semiconductors

Nonfiction, Science & Nature, Technology, Electronics, Semiconductors, Science, Chemistry, Physical & Theoretical
Cover of the book Atomic Layer Deposition for Semiconductors by , Springer US
View on Amazon View on AbeBooks View on Kobo View on B.Depository View on eBay View on Walmart
Author: ISBN: 9781461480549
Publisher: Springer US Publication: October 18, 2013
Imprint: Springer Language: English
Author:
ISBN: 9781461480549
Publisher: Springer US
Publication: October 18, 2013
Imprint: Springer
Language: English

Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.

View on Amazon View on AbeBooks View on Kobo View on B.Depository View on eBay View on Walmart

Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.

More books from Springer US

Cover of the book Progress in Motor Control by
Cover of the book Wilhelm Wundt in History by
Cover of the book The Persistence of Sail in the Age of Steam by
Cover of the book Globalization and Summit Reform by
Cover of the book Environmental Micropaleontology by
Cover of the book Ambulatory Peritoneal Dialysis by
Cover of the book Experimental and Clinical Progress in Cancer Chemotherapy by
Cover of the book Mechanisms and Pathogenesis by
Cover of the book Epidermal Cell Tumors: The Basics by
Cover of the book Contemporary Approaches to Neuropsychological Assessment by
Cover of the book The MASCC Textbook of Cancer Supportive Care and Survivorship by
Cover of the book Handbook of Psychopharmacology by
Cover of the book TelE-Learning by
Cover of the book Flesh and Blood by
Cover of the book Dry Scrubbing Technologies for Flue Gas Desulfurization by
We use our own "cookies" and third party cookies to improve services and to see statistical information. By using this website, you agree to our Privacy Policy