by
Hyongsok T. Soh, Kathryn Wilder Guarini, Calvin F. Quate
Language: English
Release Date: March 14, 2013
Scanning Probe Lithography (SPL) describes recent advances in the field of scanning probe lithography, a high resolution patterning technique that uses a sharp tip in close proximity to a sample to pattern nanometer-scale features on the sample. SPL is capable of patterning sub-30nm features with...