Volker Saile: 1 book

Micro and Nano Fabrication

Tools and Processes

by Hans H. Gatzen, Volker Saile, Jürg Leuthold
Language: English
Release Date: January 2, 2015

For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes...

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