Materials and Failures in MEMS and NEMS

Nonfiction, Science & Nature, Technology, Electronics, Microelectronics
Cover of the book Materials and Failures in MEMS and NEMS by , Wiley
View on Amazon View on AbeBooks View on Kobo View on B.Depository View on eBay View on Walmart
Author: ISBN: 9781119083863
Publisher: Wiley Publication: September 11, 2015
Imprint: Wiley-Scrivener Language: English
Author:
ISBN: 9781119083863
Publisher: Wiley
Publication: September 11, 2015
Imprint: Wiley-Scrivener
Language: English

The fabrication of MEMS has been predominately achieved by etching the polysilicon material. However, new materials are in large demands that could overcome the hurdles in fabrication or manufacturing process. Although, an enormous amount of work being accomplished in the area, most of the information is treated as confidential or privileged. It is extremely hard to find the meaningful information for the new or related developments. This book is collection of chapters written by experts in MEMS and NEMS technology. Chapters are contributed on the development of new MEMS and NEMS materials as well as on the properties of these devices. Important properties such as residual stresses and buckling behavior in the devices are discussed as separate chapters. Various models have been included in the chapters that studies the mode and mechanism of failure of the MEMS and NEMS.

This book is meant for the graduate students, research scholars and engineers who are involved in the research and developments of advanced MEMS and NEMS for a wide variety of applications. Critical information has been included for the readers that will help them in gaining precise control over dimensional stability, quality, reliability, productivity and maintenance in MEMS and NEMS. No such book is available in the market that addresses the developments and failures in these advanced devices.

View on Amazon View on AbeBooks View on Kobo View on B.Depository View on eBay View on Walmart

The fabrication of MEMS has been predominately achieved by etching the polysilicon material. However, new materials are in large demands that could overcome the hurdles in fabrication or manufacturing process. Although, an enormous amount of work being accomplished in the area, most of the information is treated as confidential or privileged. It is extremely hard to find the meaningful information for the new or related developments. This book is collection of chapters written by experts in MEMS and NEMS technology. Chapters are contributed on the development of new MEMS and NEMS materials as well as on the properties of these devices. Important properties such as residual stresses and buckling behavior in the devices are discussed as separate chapters. Various models have been included in the chapters that studies the mode and mechanism of failure of the MEMS and NEMS.

This book is meant for the graduate students, research scholars and engineers who are involved in the research and developments of advanced MEMS and NEMS for a wide variety of applications. Critical information has been included for the readers that will help them in gaining precise control over dimensional stability, quality, reliability, productivity and maintenance in MEMS and NEMS. No such book is available in the market that addresses the developments and failures in these advanced devices.

More books from Wiley

Cover of the book Visual Guide to ETFs by
Cover of the book Solar Engineering of Thermal Processes by
Cover of the book How to Teach Using Simulation in Healthcare by
Cover of the book Integrated Care by
Cover of the book An Introduction to Value-at-Risk by
Cover of the book Long-Term Secrets to Short-Term Trading by
Cover of the book The Profitable Consultant by
Cover of the book Fit für die Next Economy by
Cover of the book Competitive Quality and Innovation by
Cover of the book Textbook of Clinical Gastroenterology and Hepatology by
Cover of the book Fusion Plasma Physics by
Cover of the book Rapid Organizational Change by
Cover of the book What Works by
Cover of the book Advanced Solutions in Power Systems by
Cover of the book The British and Irish Short Story Handbook by
We use our own "cookies" and third party cookies to improve services and to see statistical information. By using this website, you agree to our Privacy Policy