Nanoimprint Lithography: An Enabling Process for Nanofabrication

Nonfiction, Science & Nature, Technology, Nanotechnology, Material Science
Cover of the book Nanoimprint Lithography: An Enabling Process for Nanofabrication by Weimin Zhou, Springer Berlin Heidelberg
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Author: Weimin Zhou ISBN: 9783642344282
Publisher: Springer Berlin Heidelberg Publication: January 4, 2013
Imprint: Springer Language: English
Author: Weimin Zhou
ISBN: 9783642344282
Publisher: Springer Berlin Heidelberg
Publication: January 4, 2013
Imprint: Springer
Language: English

Nanoimprint Lithography: An enabling process for nanofabrication presents a comprehensive description of nanotechnology that is one of the most promising low-cost, high-throughput technologies for manufacturing nanostructures, and an emerging lithography candidates for 22, 16 and 11 nm nodes. It provides the exciting, multidisciplinary field, offering a wide range of topics covering: principles, process, material and application.
This book would be of specific interest for researchers and graduate students in the field of nanoscience, nanotechnology and nanofabrication, material, physical, chemical, electric engineering and biology.
Dr. Weimin Zhou is an associate professor at Shanghai Nanotechnology Promotion Center, China.

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Nanoimprint Lithography: An enabling process for nanofabrication presents a comprehensive description of nanotechnology that is one of the most promising low-cost, high-throughput technologies for manufacturing nanostructures, and an emerging lithography candidates for 22, 16 and 11 nm nodes. It provides the exciting, multidisciplinary field, offering a wide range of topics covering: principles, process, material and application.
This book would be of specific interest for researchers and graduate students in the field of nanoscience, nanotechnology and nanofabrication, material, physical, chemical, electric engineering and biology.
Dr. Weimin Zhou is an associate professor at Shanghai Nanotechnology Promotion Center, China.

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