Nanopositioning Technologies

Fundamentals and Applications

Nonfiction, Science & Nature, Technology, Nanotechnology, Electronics
Cover of the book Nanopositioning Technologies by , Springer International Publishing
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Author: ISBN: 9783319238531
Publisher: Springer International Publishing Publication: December 22, 2015
Imprint: Springer Language: English
Author:
ISBN: 9783319238531
Publisher: Springer International Publishing
Publication: December 22, 2015
Imprint: Springer
Language: English

This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.

View on Amazon View on AbeBooks View on Kobo View on B.Depository View on eBay View on Walmart

This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.

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