Rapid Thermal Processing

Science and Technology

Nonfiction, Science & Nature, Technology, Material Science, Manufacturing
Cover of the book Rapid Thermal Processing by , Elsevier Science
View on Amazon View on AbeBooks View on Kobo View on B.Depository View on eBay View on Walmart
Author: ISBN: 9780323139809
Publisher: Elsevier Science Publication: December 2, 2012
Imprint: Academic Press Language: English
Author:
ISBN: 9780323139809
Publisher: Elsevier Science
Publication: December 2, 2012
Imprint: Academic Press
Language: English

This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book covers a range of topics for academics and engineers alike, moving from basic theory to advanced technology for wafer manufacturing. The book also provides new information on the suitability or RTP for thin film deposition, junction formation, silicides, epitaxy, and in situ processing. Complete discussions on equipment designs and comparisons between RTP and other processing approaches also make this book useful for supplemental information on silicon processing, VLSI processing, and integrated circuit engineering.

View on Amazon View on AbeBooks View on Kobo View on B.Depository View on eBay View on Walmart

This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book covers a range of topics for academics and engineers alike, moving from basic theory to advanced technology for wafer manufacturing. The book also provides new information on the suitability or RTP for thin film deposition, junction formation, silicides, epitaxy, and in situ processing. Complete discussions on equipment designs and comparisons between RTP and other processing approaches also make this book useful for supplemental information on silicon processing, VLSI processing, and integrated circuit engineering.

More books from Elsevier Science

Cover of the book Calcium-Binding Proteins in Health and Disease by
Cover of the book Principles and Practice of Big Data by
Cover of the book Modeling, Identification and Control of Robots by
Cover of the book Acoustics: Sound Fields, Transducers and Vibration by
Cover of the book Deploying QoS for Cisco IP and Next Generation Networks by
Cover of the book Journeys in Science by
Cover of the book Trigeminocardiac Reflex by
Cover of the book Elsevier's Dictionary of Mammals by
Cover of the book The Smart Card Report by
Cover of the book Magnetobiology by
Cover of the book Nanosensors for Chemical and Biological Applications by
Cover of the book Serpin Structure and Evolution by
Cover of the book Maximizing Electronic Resources Management in Libraries by
Cover of the book Desalination Sustainability by
Cover of the book Aminoff's Neurology and General Medicine by
We use our own "cookies" and third party cookies to improve services and to see statistical information. By using this website, you agree to our Privacy Policy