Rapid Thermal Processing

Science and Technology

Nonfiction, Science & Nature, Technology, Material Science, Manufacturing
Cover of the book Rapid Thermal Processing by , Elsevier Science
View on Amazon View on AbeBooks View on Kobo View on B.Depository View on eBay View on Walmart
Author: ISBN: 9780323139809
Publisher: Elsevier Science Publication: December 2, 2012
Imprint: Academic Press Language: English
Author:
ISBN: 9780323139809
Publisher: Elsevier Science
Publication: December 2, 2012
Imprint: Academic Press
Language: English

This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book covers a range of topics for academics and engineers alike, moving from basic theory to advanced technology for wafer manufacturing. The book also provides new information on the suitability or RTP for thin film deposition, junction formation, silicides, epitaxy, and in situ processing. Complete discussions on equipment designs and comparisons between RTP and other processing approaches also make this book useful for supplemental information on silicon processing, VLSI processing, and integrated circuit engineering.

View on Amazon View on AbeBooks View on Kobo View on B.Depository View on eBay View on Walmart

This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book covers a range of topics for academics and engineers alike, moving from basic theory to advanced technology for wafer manufacturing. The book also provides new information on the suitability or RTP for thin film deposition, junction formation, silicides, epitaxy, and in situ processing. Complete discussions on equipment designs and comparisons between RTP and other processing approaches also make this book useful for supplemental information on silicon processing, VLSI processing, and integrated circuit engineering.

More books from Elsevier Science

Cover of the book Citrix XenDesktop Implementation by
Cover of the book Robotics and Automation in the Food Industry by
Cover of the book Advanced Power Plant Materials, Design and Technology by
Cover of the book Emotions, Technology, and Learning by
Cover of the book Membrane Protein Crystallization by
Cover of the book Electron Paramagnetic Resonance Investigations of Biological Systems by Using Spin Labels, Spin Probes, and Intrinsic Metal Ions Part A by
Cover of the book Liposomes, Part D by
Cover of the book TOF-MS within Food and Environmental Analysis by
Cover of the book 1. Forsthoffer's Rotating Equipment Handbooks by
Cover of the book CdTe and Related Compounds; Physics, Defects, Hetero- and Nano-structures, Crystal Growth, Surfaces and Applications by
Cover of the book Gas Purification by
Cover of the book Thymosins by
Cover of the book Nucleic Acid Sensing and Immunity - PART B by
Cover of the book Applied Dermatotoxicology by
Cover of the book Handbook of Economic Forecasting by
We use our own "cookies" and third party cookies to improve services and to see statistical information. By using this website, you agree to our Privacy Policy