Janusz Bogdanowicz: 1 book
Photomodulated Optical Reflectance
A Fundamental Study Aimed at Non-Destructive Carrier Profiling in Silicon
Language: English
Release Date: June 26, 2012
One of the critical issues in semiconductor technology is the precise electrical characterization of ultra-shallow junctions. Among the plethora of measurement techniques, the optical reflectance approach developed in this work is the sole concept that does not require physical contact, making it...
