Photomodulated Optical Reflectance

A Fundamental Study Aimed at Non-Destructive Carrier Profiling in Silicon

Nonfiction, Science & Nature, Technology, Electronics, Semiconductors, Science, Other Sciences, Applied Sciences
Cover of the book Photomodulated Optical Reflectance by Janusz Bogdanowicz, Springer Berlin Heidelberg
View on Amazon View on AbeBooks View on Kobo View on B.Depository View on eBay View on Walmart
Author: Janusz Bogdanowicz ISBN: 9783642301087
Publisher: Springer Berlin Heidelberg Publication: June 26, 2012
Imprint: Springer Language: English
Author: Janusz Bogdanowicz
ISBN: 9783642301087
Publisher: Springer Berlin Heidelberg
Publication: June 26, 2012
Imprint: Springer
Language: English

One of the critical issues in semiconductor technology is the precise electrical characterization of ultra-shallow junctions. Among the plethora of measurement techniques, the optical reflectance approach developed in this work is the sole concept that does not require physical contact, making it suitable for non-invasive in-line metrology. This work develops extensively all the fundamental physical models of the photomodulated optical reflectance technique and introduces novel approaches that extend its applicability from dose monitoring towards detailed carrier profile reconstruction. It represents a significant breakthrough in junction metrology with potential for industrial implementation.

View on Amazon View on AbeBooks View on Kobo View on B.Depository View on eBay View on Walmart

One of the critical issues in semiconductor technology is the precise electrical characterization of ultra-shallow junctions. Among the plethora of measurement techniques, the optical reflectance approach developed in this work is the sole concept that does not require physical contact, making it suitable for non-invasive in-line metrology. This work develops extensively all the fundamental physical models of the photomodulated optical reflectance technique and introduces novel approaches that extend its applicability from dose monitoring towards detailed carrier profile reconstruction. It represents a significant breakthrough in junction metrology with potential for industrial implementation.

More books from Springer Berlin Heidelberg

Cover of the book Evolutionary Biology – Concepts, Biodiversity, Macroevolution and Genome Evolution by Janusz Bogdanowicz
Cover of the book Einführung in die Kryptographie by Janusz Bogdanowicz
Cover of the book Postoperative Thromboembolism by Janusz Bogdanowicz
Cover of the book Psychologie des Lebenssinns by Janusz Bogdanowicz
Cover of the book JIMD Reports, Volume 17 by Janusz Bogdanowicz
Cover of the book Climate Change - Environment and Civilization in the Middle East by Janusz Bogdanowicz
Cover of the book Early Gastric Cancer by Janusz Bogdanowicz
Cover of the book Entscheidungstheorie by Janusz Bogdanowicz
Cover of the book Spatial Data Mining by Janusz Bogdanowicz
Cover of the book Angiocardiography by Janusz Bogdanowicz
Cover of the book Wild Crop Relatives: Genomic and Breeding Resources by Janusz Bogdanowicz
Cover of the book Molecular Design in Inorganic Biochemistry by Janusz Bogdanowicz
Cover of the book Armed Conflict Injuries to the Extremities by Janusz Bogdanowicz
Cover of the book Breast Cancer by Janusz Bogdanowicz
Cover of the book Querschnittlähmung - Schritte der Bewältigung by Janusz Bogdanowicz
We use our own "cookies" and third party cookies to improve services and to see statistical information. By using this website, you agree to our Privacy Policy