Photomodulated Optical Reflectance

A Fundamental Study Aimed at Non-Destructive Carrier Profiling in Silicon

Nonfiction, Science & Nature, Technology, Electronics, Semiconductors, Science, Other Sciences, Applied Sciences
Cover of the book Photomodulated Optical Reflectance by Janusz Bogdanowicz, Springer Berlin Heidelberg
View on Amazon View on AbeBooks View on Kobo View on B.Depository View on eBay View on Walmart
Author: Janusz Bogdanowicz ISBN: 9783642301087
Publisher: Springer Berlin Heidelberg Publication: June 26, 2012
Imprint: Springer Language: English
Author: Janusz Bogdanowicz
ISBN: 9783642301087
Publisher: Springer Berlin Heidelberg
Publication: June 26, 2012
Imprint: Springer
Language: English

One of the critical issues in semiconductor technology is the precise electrical characterization of ultra-shallow junctions. Among the plethora of measurement techniques, the optical reflectance approach developed in this work is the sole concept that does not require physical contact, making it suitable for non-invasive in-line metrology. This work develops extensively all the fundamental physical models of the photomodulated optical reflectance technique and introduces novel approaches that extend its applicability from dose monitoring towards detailed carrier profile reconstruction. It represents a significant breakthrough in junction metrology with potential for industrial implementation.

View on Amazon View on AbeBooks View on Kobo View on B.Depository View on eBay View on Walmart

One of the critical issues in semiconductor technology is the precise electrical characterization of ultra-shallow junctions. Among the plethora of measurement techniques, the optical reflectance approach developed in this work is the sole concept that does not require physical contact, making it suitable for non-invasive in-line metrology. This work develops extensively all the fundamental physical models of the photomodulated optical reflectance technique and introduces novel approaches that extend its applicability from dose monitoring towards detailed carrier profile reconstruction. It represents a significant breakthrough in junction metrology with potential for industrial implementation.

More books from Springer Berlin Heidelberg

Cover of the book Anorexia Nervosa and Other Dyscontrol Syndromes by Janusz Bogdanowicz
Cover of the book Kidney Cancer by Janusz Bogdanowicz
Cover of the book The Craniovertebral Region in Chronic Inflammatory Rheumatic Diseases by Janusz Bogdanowicz
Cover of the book Financial Modeling, Actuarial Valuation and Solvency in Insurance by Janusz Bogdanowicz
Cover of the book Unendliche Neugier by Janusz Bogdanowicz
Cover of the book Allgemeine Psychologie by Janusz Bogdanowicz
Cover of the book Cholecystokinin Antagonists in Gastroenterology by Janusz Bogdanowicz
Cover of the book Schwingungen mechanischer Antriebssysteme by Janusz Bogdanowicz
Cover of the book Gesetzestexte suchen, verstehen und in der Klausur anwenden by Janusz Bogdanowicz
Cover of the book Surgery for Endocrinological Diseases and Malformations in Childhood by Janusz Bogdanowicz
Cover of the book The Sound of Silence by Janusz Bogdanowicz
Cover of the book Pediatric Kidney Disease by Janusz Bogdanowicz
Cover of the book Kompendium semantische Netze by Janusz Bogdanowicz
Cover of the book Die Stoffklassen der organischen Chemie by Janusz Bogdanowicz
Cover of the book Thermische Turbomaschinen by Janusz Bogdanowicz
We use our own "cookies" and third party cookies to improve services and to see statistical information. By using this website, you agree to our Privacy Policy