Handbook of Silicon Wafer Cleaning Technology

Nonfiction, Science & Nature, Technology, Electronics, Circuits
Cover of the book Handbook of Silicon Wafer Cleaning Technology by , Elsevier Science
View on Amazon View on AbeBooks View on Kobo View on B.Depository View on eBay View on Walmart
Author: ISBN: 9780815517733
Publisher: Elsevier Science Publication: December 10, 2008
Imprint: William Andrew Language: English
Author:
ISBN: 9780815517733
Publisher: Elsevier Science
Publication: December 10, 2008
Imprint: William Andrew
Language: English

The second Edition of the Handbook of Silicon Wafer Cleaning Technology is intended to provide knowledge of wet, plasma, and other surface conditioning techniques used to manufacture integrated circuits. The integration of the clean processes into the device manufacturing flow will be presented with respect to other manufacturing steps such as thermal, implant, etching, and photolithography processes. The Handbook discusses both wet and plasma-based cleaning technologies that are used for removing contamination, particles, residue, and photoresist from wafer surfaces. Both the process and the equipment are covered. A review of the current cleaning technologies is included. Also, advanced cleaning technologies that are under investigation for next generation processing are covered; including supercritical fluid, laser, and cryoaerosol cleaning techniques. Additionally theoretical aspects of the cleaning technologies and how these processes affect the wafer is discussed such as device damage and surface roughening will be discussed. The analysis of the wafers surface is outlined. A discussion of the new materials and the changes required for the surface conditioning process used for manufacturing is also included.

  • Focused on silicon wafer cleaning techniques including wet, plasma, and other surface conditioning techniques used to manufacture integrated circuits
  • As this book covers the major technologies for removing contaminants, it is a reliable reference for anyone that manufactures integrated circuits, or supplies the semiconductor and microelectronics industries
  • Covers processes and equipment, as well as new materials and changes required for the surface conditioning process
  • Editors are two of the top names in the field and are both extensively published
  • Discusses next generation processing techniques including supercritical fluid, laser, and cryoaerosol
View on Amazon View on AbeBooks View on Kobo View on B.Depository View on eBay View on Walmart

The second Edition of the Handbook of Silicon Wafer Cleaning Technology is intended to provide knowledge of wet, plasma, and other surface conditioning techniques used to manufacture integrated circuits. The integration of the clean processes into the device manufacturing flow will be presented with respect to other manufacturing steps such as thermal, implant, etching, and photolithography processes. The Handbook discusses both wet and plasma-based cleaning technologies that are used for removing contamination, particles, residue, and photoresist from wafer surfaces. Both the process and the equipment are covered. A review of the current cleaning technologies is included. Also, advanced cleaning technologies that are under investigation for next generation processing are covered; including supercritical fluid, laser, and cryoaerosol cleaning techniques. Additionally theoretical aspects of the cleaning technologies and how these processes affect the wafer is discussed such as device damage and surface roughening will be discussed. The analysis of the wafers surface is outlined. A discussion of the new materials and the changes required for the surface conditioning process used for manufacturing is also included.

More books from Elsevier Science

Cover of the book Comprehensive Handbook of Iodine by
Cover of the book Psychophysiology by
Cover of the book UML 2 Certification Guide by
Cover of the book Laser Shock Peening by
Cover of the book Technology of Efficient Energy Utilization by
Cover of the book Foods, Nutrients and Food Ingredients with Authorised EU Health Claims by
Cover of the book Advances in Agronomy by
Cover of the book Advances in Agronomy by
Cover of the book Automating Open Source Intelligence by
Cover of the book Kappa Distributions by
Cover of the book Reservoir Exploration and Appraisal by
Cover of the book Nanoparticulate Drug Delivery by
Cover of the book Multimedia Information Retrieval by
Cover of the book Advances in Immunology by
Cover of the book The Claustrum by
We use our own "cookies" and third party cookies to improve services and to see statistical information. By using this website, you agree to our Privacy Policy