Physics of Radiofrequency Capacitive Discharge

Nonfiction, Science & Nature, Science, Physics, General Physics
Cover of the book Physics of Radiofrequency Capacitive Discharge by V. P. Savinov, CRC Press
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Author: V. P. Savinov ISBN: 9780429894220
Publisher: CRC Press Publication: May 23, 2018
Imprint: CRC Press Language: English
Author: V. P. Savinov
ISBN: 9780429894220
Publisher: CRC Press
Publication: May 23, 2018
Imprint: CRC Press
Language: English

This book describes the physical mechanism of high-frequency (radio-frequency) capacitive discharge (RFCD) of low and medium pressure and the properties of discharge plasma in detail. The main properties and characteristics of RFCD, the features of electric breakdown in a high-frequency field are also investigated. The properties of near-electrode layers of a spatial discharge, the nature of the electric field in them, and the processes of charge transport to electrodes are explored. The work is intended for scientists engaged in gas discharge physics and low-temperature plasmas, graduate students and students of physics, physical chemistry, and relevant specialties.

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This book describes the physical mechanism of high-frequency (radio-frequency) capacitive discharge (RFCD) of low and medium pressure and the properties of discharge plasma in detail. The main properties and characteristics of RFCD, the features of electric breakdown in a high-frequency field are also investigated. The properties of near-electrode layers of a spatial discharge, the nature of the electric field in them, and the processes of charge transport to electrodes are explored. The work is intended for scientists engaged in gas discharge physics and low-temperature plasmas, graduate students and students of physics, physical chemistry, and relevant specialties.

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